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photolithography
Also known as: optical lithography
Learn about this topic in these articles:
integrated circuits
- In integrated circuit: Photolithography
In order to alter specific locations on a wafer, a photoresist layer is first applied (as described in the section Deposition). Photoresist, or just resist, typically dissolves in a high-pH solution after exposure to light (including ultraviolet radiation or X-rays
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nanotechnology
- In nanotechnology: Top-down approach
Optical lithography is a relatively mature field because of the high degree of refinement in microelectronic chip manufacturing, with current short-wavelength optical lithography techniques reaching dimensions just below 100 nanometres (the traditional threshold definition of the nanoscale). Shorter-wavelength sources, such as extreme ultraviolet and X-ray,…
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