reactive ion etching

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reactive ion etching

finishing process

Also known as: RIE

Learn about this topic in these articles:

integrated circuits

In integrated circuit: Etching
…with strong chemicals or by reactive ion etching (RIE). RIE is like sputtering in the argon chamber, but the polarity is reversed and different gas mixtures are used. The atoms on the surface of the wafer fly away, leaving it bare.
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